|Introduction to SECS/GEM - Beginner's Guide|
|SEMI E30 GEM standard|
|SEMI E5 SECS-II Message|
|SEMI E37 HSMS|
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The GEM standard defines a common set of equipment behavior and communications capabilities that provide the functionality and flexibility to support the manufacturing automation programs of semiconductor device manufacturers. Equipment suppliers may provide additional SECS-II functionality not included in GEM as long as the additional functionality does not conflict with any of the behavior or capabilities defined in GEM. Such additions may include SECS-II messages, collection events, alarms, remote command codes, processing states, variable data items (data values, status values or equipment constants), or other functionality that is unique to a class (etchers, steppers, etc.) or specific instance of equipment.
The COMMUNICATION state model defines the behavior of the equipment in relation to the existence or absence of a communication link with the host. It also defines how communication is established or re-established with S1F13/S1F14 when communication is broken
The CONTROL state model defines the level of cooperation between the host and equipment. The CONTROL model provides the host with three basic levels of host control which determine the host's ability to control the equipment:
The PROCESSING state model is highly dependent on the equipment process, technology, and style. However, there are expected to be common aspects to these models.
Host can send command to instruct the equipment to perform an automatic operation. E.g.: START, STOP, PAUSE, etc. This is similar to the manual operation performed by operator on the console.
The GEM standard defines three types of variable which are accessible by the Host:
SECS/GEM a couple of avenues for Host to collect data or information from the equipment:
This feature allows the Equipment to notify Host for every occurrence or clearance of an alarm/error on the equipment. Alarm refers to those occurrence that are abnormal, undesirable and endanger people, equipment or physical material being processed.
Below are some of the characteristics of Alarm Management defined by GEM:
The SECS/GEM standard requires that each equipment provide a GEM Interface Reference Manual. It must include GEM Compliance statement, Complete SECS-II message documentation, State Model, list of status variables, equipment constants, data variables, alarms, collection events, etc that are defined/supported by the equipment.
Please refer to the complete standard for other features like: Spooling, Process Program, Terminal Services and Limit Monitoring.