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SECS/GEM Software Solution for 300mm Tools

Solution Overview

Additional Resources

STHGEM300 is an advanced toolkit meticulously designed for equipment manufacturers, ensuring the seamless implementation of crucial SEMI GEM300 compliant standards, including E39, E40, E87, E90, and E94, specifically tailored for 300mm wafer processing equipment. What sets STHGEM300 apart is its foundation on .NET and .NET Core technologies enabling rapid development, high performance and cross platform compatibility.

Leveraging the robust foundation of our flagship product, SecsToHost.Net, STHGEM300 utilizes software SDK for the implementation of SEMI SECS/GEM E4, E5, E30, and E37. The .NET libraries are crafted for easy integration into your equipment controller software, providing a comprehensive solution for elevating the efficiency and compliance of your 300mm wafer processing equipment. 

  • SEMI E04 - RS232

  • SEMI E37 - HSMS

  • SEMI E05 - SECS-II Message Specification

  • SEMI E30 - GEM

  • SEMI E39 - Object Services

  • SEMI E87 - Carrier Management (support Carrier Ready to Unload Prediction)

  • SEMI E90 - Substrate Tracking (support Substrate ID verification)

  • SEMI E40 - Process Job Management

  • SEMI E94 - Control Job Management (support Material Redirection)

  • SEMI E116 - Equipment Performance Tracking

Supported SEMI Standards

Features and Benefits

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Ease of

Navigate GEM300 complex scenarios effortlessly with STHGEM300's intelligent API calls, minimizing development costs and efforts for equipment suppliers.


GEM300 Scenarios

Automatic message processing and manages interdependencies between GEM300 standards. 


Comply with SEMATECH and SELETE Guideline

 Ensure compatibility with any factory host automation specification covering SECS/GEM, process management, carrier management, substrate tracking, control job management and equipment performance.


Cross Platform

 Ensures compatibility across various platforms (Windows and Linux) with .NET Core.


Automatic GEM300 Documentation

Time saving with the automatic SEMI documentation generation with Model Builder.

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