
STHGEM300
SECS/GEM Software Solution for 300mm Tools
Solution Overview
Equipment Manufacturers use the STHGEM300 SDK to implement SEMI GEM300 compliant standards – E39, E40, E87, E90 and E94 – that are required for 300mm wafer processing equipment.
Semiconductor factories require all 300mm tools to comply with these industry standards, as well as factory-specific scenarios.
STHGEM300 is built on our flagship product SecsToHost.Net, a software SDK for implementing SEMI SECS/GEM E4, E5, E30 and E37. The .NET libraries can be easily integrated into your equipment controller software.
Additional Resources

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SEMI E4 - RS232
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SEMI E37 - HSMS
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SEMI E5 - SECS-II Message Specification
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SEMI E30 - GEM
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SEMI E39 - Object Services
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SEMI E87 - Carrier Management
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SEMI E90 - Substrate Tracking
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SEMI E40 - Process Job Management
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SEMI E94 - Control Job Management
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SEMI E116 - Equipment Performance Tracking (future release)