STHGEM300
SECS/GEM Software Solution for 300mm Tools
Solution Overview
Additional Resources
STHGEM300 is an advanced toolkit meticulously designed for equipment manufacturers, ensuring the seamless implementation of crucial SEMI GEM300 compliant standards, including E39, E40, E87, E90, and E94, specifically tailored for 300mm wafer processing equipment. What sets STHGEM300 apart is its foundation on .NET and .NET Core technologies enabling rapid development, high performance and cross platform compatibility.
Leveraging the robust foundation of our flagship product, SecsToHost.Net, STHGEM300 utilizes software SDK for the implementation of SEMI SECS/GEM E4, E5, E30, and E37. The .NET libraries are crafted for easy integration into your equipment controller software, providing a comprehensive solution for elevating the efficiency and compliance of your 300mm wafer processing equipment.
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SEMI E04 - RS232
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SEMI E37 - HSMS
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SEMI E05 - SECS-II Message Specification
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SEMI E30 - GEM
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SEMI E39 - Object Services
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SEMI E87 - Carrier Management (support Carrier Ready to Unload Prediction)
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SEMI E90 - Substrate Tracking (support Substrate ID verification)
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SEMI E40 - Process Job Management
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SEMI E94 - Control Job Management (support Material Redirection)
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SEMI E116 - Equipment Performance Tracking
Supported SEMI Standards
Features and Benefits
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Ease of
Integration
Navigate GEM300 complex scenarios effortlessly with STHGEM300's intelligent API calls, minimizing development costs and efforts for equipment suppliers.
Simplified
GEM300 Scenarios
Automatic message processing and manages interdependencies between GEM300 standards.
Comply with SEMATECH and SELETE Guideline
Ensure compatibility with any factory host automation specification covering SECS/GEM, process management, carrier management, substrate tracking, control job management and equipment performance.
Cross Platform
Support
Ensures compatibility across various platforms (Windows and Linux) with .NET Core.
Automatic GEM300 Documentation
Time saving with the automatic SEMI documentation generation with Model Builder.